一种钼铌合金溅射靶材的制备方法

Preparation method of molybdenum-niobium alloy sputtering target

Abstract

The invention discloses a preparation method of a molybdenum-niobium alloy sputtering target. The method comprises the following steps: (1) molybdenum powder and niobium powder are put in a mixing tank of a mixing machine for uniformly mixing to obtain mixed powder; (2) the cold isostatic pressing is performed for the mixed powder to obtain a slab; and the slab is pre-sintered under the vacuum or hydrogen atmosphere protection condition to obtain a molybdenum-niobium alloy prefabricated blank; (3) the surface of the molybdenum-niobium alloy prefabricated blank is turned and milled; and the hot isostatic pressing is performed to obtain a molybdenum-niobium alloy part; and (4) the mechanical processing and the surface grinding are performed for the molybdenum-niobium alloy part to obtain the molybdenum-niobium alloy sputtering target. The preparation method is simple in process, and saves raw materials; the introduction of impurity elements can be reduced in the preparation process; the prepared molybdenum-niobium alloy sputtering target is uniform in components, free of segregation and fine in grains; the theoretic density can reach above 99%; the oxygen mass content is lower than 500 ppm; and the requirements of the sputtering target can be preferably satisfied.
本发明公开了一种钼铌合金溅射靶材的制备方法,该方法为:一、将钼粉和铌粉置于混料机的混料罐中搅拌混合均匀,得到混合粉末;二、对混合粉末进行冷等静压,得到板坯,然后对将述板坯在真空或者氢气气氛保护条件下进行预烧结处理,得到钼铌合金预制坯料;三、将钼铌合金预制坯料表面车铣加工,然后进行热等静压,得到钼铌合金制件;四、对钼铌合金制件进行机械加工和表面磨削加工,得到钼铌合金溅射靶材。本发明制备过程简单、节约原料,且制备过程能够减少杂质元素的引入,制备得到的钼铌合金溅射靶材成分均匀、无偏析、晶粒细小,理论密度可达到99%以上,氧质量含量低于500ppm,能够很好的满足作为溅射靶材的要求。

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    Publication numberPublication dateAssigneeTitle
    CN-106513664-AMarch 22, 2017洛阳科威钨钼有限公司一种钼钾合金靶材的制备方法